RTF-PECVD-1200 rotary PECVD system

Product name: RTF-PECVD-1200 Rotable PECVD system

Model number: RTF-PECVD-1200

Minimum minimum: 1

Product Summary:
RTF-PECVD-1200 rotary PECVD system has power off protection function, and is equipped with communication interface and software, the furnace of rotary PECVD system is formed by Japanese technology, heating around, the temperature field is more balanced.

product description
RTF-PECVD-1200 Rotational PECVD System Details:
NO.1 Swedish KANTHAL A1 resistance silk
KANTHAL A1 Raw wire domestic resistance wire furnace, imported resistance wire furnace
(1)The surface temperature can reach 1420℃
(2)the surface is stainless steel color (very bright, customer identification should pay attention to), will not rust, use again for a long time will not drop slag.
(3)Resistance equilibrium, temperature and field equilibrium
NO.2 is equipped with air conditioning switch and leakage protector
When the circuit is overcurrent or leakage, the empty meeting is automatically disconnected.
NO.3 Connect to a computer (buy)
OTL1200 Single temperature area rotating tube furnace is equipped with communication interface and software, can directly through the computer control furnace parameters, and can be observed from the computer on the stove PV and SV temperature value and the operation of the instrument, the actual heating curve computer real-time drawing, and can save the temperature data of each moment, can be out at any time
NO.4 furnace
1.vacuum filter formed high quality high purity alumina polycrystalline fiber curing furnace.
2.Adopt Japanese technology to shape.
3.The spacing and pitch of the resistance wires in the furnace are all arranged according to the optimal thermal technology in Japan, and the thermal field is simulated through the thermal software
4.using 4 weeks of heating, the temperature field is more balanced
NO.5 optional UL certified electrical board (all UL certified imported appliances)
NO.6 Certification
NO.7 flanges (optional after communication)

RTF-PECVD-1200 Rottational PECVD System Product Model Specification:

Heating element: Sweden Kanthal A1 imported resistance wire (resistance wire promises 2 year warranty)

control method:
Adopt temperature control instrument (standard)
Optional Japanese conductive program temperature control instrument
1.Intelligent PID adjustment of temperature control in section 30.
2.with over temperature protection when the electric furnace heating circuit automatically over temperature or break off, (when the electric furnace temperature exceeds 1200 degrees or the thermocouple burned off, the AC relay on the main circuit will automatically disconnected, the main circuit disconnected, the panel ON lamp off, OFF light, limited protection electric furnace).
3.with 485 communication interface (standard when choosing software)
4.With the function of power off protection, that is, when the power is cut off and the power is started, the program does not rise from the starting temperature, but from the furnace temperature when the power is cut off.
5.The instrument has the function of temperature self-setting
Temperature control mode: intelligent PID
break protection and display: over
temperature protection: yes
overcurrent protection: yes

Furnace material:
1.vacuum filter formed high quality high purity alumina polycrystalline fiber curing furnace.
2.Adopt Japanese technology to shape.
3.The spacing and pitch of the resistance wires in the furnace are all arranged according to the optimal thermal technology in Japan, and the thermal field is simulated through the thermal software
Control accuracy: + / -1℃
Trigger: Phase shift trigger
Electrical appliances: Zhejiang Chint
Si: 106 / 16E Simenon, Germany
Maximum temperature: 1,200℃
Rated temperature: 1,100℃
Heating rate: 20℃ / Min (can be modified upon request)
Recommended heating rate: 10℃ / Min
Thermocouple model: Model K type
Heating section length: 400mm   

Vacuum flange
1.in order to increase the pumping rate, to achieve the requirements of a higher vacuum. The original hose joint can be replaced with KF-25 interface (VS-0.1 and VS high vacuum system interface are both KF 25)
2.If used for gas supply system, the original hose joint can be replaced with Φ 6.35mm double card sleeve joint.
Rotary motor power: 40W
Electric pushrod power: 40W
Tilting angle of the furnace: -10~30 degrees
Furnace tube rotation rate: variable motor speed can be adjusted between 1-25 rpm
Rotational sealing mode: use rotating magnetic fluid sealing
Outer surface temperature: 45℃